Surface trap distribution test method and device based on optical excitation

The invention provides a surface trap distribution testing method and device based on optical excitation, and belongs to the technical field of dielectric property testing of solid dielectric materials. According to the method, preset excitation energy parameters are sent to electronic gun equipment, so that the electronic gun equipment emits corresponding sunken charges to a to-be-tested sample in a first time period. Wherein the to-be-tested sample is a solid medium which is oppositely arranged at the emission end of the electron gun equipment and the collection end of the surface potentiometer through a movable connecting device. And under the condition that the sinking charge is injected into the sample to be detected, generating a light source excitation instruction, and enabling the light source excitation equipment to sequentially emit the photon flow with the preset wavelength to the sample to be detected through the light source excitation instruction. Through oppositely arranged surface potentiomete