Temperature-coupled sliding film differential resonant pressure sensor and preparation method thereof
The invention discloses a temperature-coupled sliding film differential resonant pressure sensor and a preparation method thereof, the sensor comprises a pressure guide glass layer, a pressure sensitive film layer and a resonant structure layer which are sequentially connected from bottom to top, an...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | CHE YANXIAN |
| description | The invention discloses a temperature-coupled sliding film differential resonant pressure sensor and a preparation method thereof, the sensor comprises a pressure guide glass layer, a pressure sensitive film layer and a resonant structure layer which are sequentially connected from bottom to top, and an aluminum film is arranged on the surface of a detection electrode of the resonant structure layer to form a temperature-sensitive composite detection electrode. And the detection electrode and the other detection electrode form a dual detection electrode. According to the sensor, differential calculation can be carried out by utilizing detection signals of the double detection electrodes, the coupling effect of temperature on the sensor is eliminated, so that the measurement precision of the sensor can be greatly improved, high-precision and temperature-coupled pressure measurement is realized, and the sensor has the advantages of high measurement precision, strong anti-interference capability, easiness in pac |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN115683399A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN115683399A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN115683399A3</originalsourceid><addsrcrecordid>eNqNjEEKwjAURLtxIeodvgfoohTFLktRXLnqvoRmYgPp_yE_vb8RPICrGYb3Zl9hxBqRTN4S6lm2GGBJg7ee3-R8WMl655DA2ZtACSpsOFMsTYtDClZJZNh-t2jKlRemFXkRS3kpqrhjtXMmKE6_PFTnx30cnjWiTNBoZjDyNLya5nK9tW3X9e0_zAfeXkCP</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Temperature-coupled sliding film differential resonant pressure sensor and preparation method thereof</title><source>esp@cenet</source><creator>CHE YANXIAN</creator><creatorcontrib>CHE YANXIAN</creatorcontrib><description>The invention discloses a temperature-coupled sliding film differential resonant pressure sensor and a preparation method thereof, the sensor comprises a pressure guide glass layer, a pressure sensitive film layer and a resonant structure layer which are sequentially connected from bottom to top, and an aluminum film is arranged on the surface of a detection electrode of the resonant structure layer to form a temperature-sensitive composite detection electrode. And the detection electrode and the other detection electrode form a dual detection electrode. According to the sensor, differential calculation can be carried out by utilizing detection signals of the double detection electrodes, the coupling effect of temperature on the sensor is eliminated, so that the measurement precision of the sensor can be greatly improved, high-precision and temperature-coupled pressure measurement is realized, and the sensor has the advantages of high measurement precision, strong anti-interference capability, easiness in pac</description><language>chi ; eng</language><subject>MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PHYSICS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TESTING ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230203&DB=EPODOC&CC=CN&NR=115683399A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230203&DB=EPODOC&CC=CN&NR=115683399A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHE YANXIAN</creatorcontrib><title>Temperature-coupled sliding film differential resonant pressure sensor and preparation method thereof</title><description>The invention discloses a temperature-coupled sliding film differential resonant pressure sensor and a preparation method thereof, the sensor comprises a pressure guide glass layer, a pressure sensitive film layer and a resonant structure layer which are sequentially connected from bottom to top, and an aluminum film is arranged on the surface of a detection electrode of the resonant structure layer to form a temperature-sensitive composite detection electrode. And the detection electrode and the other detection electrode form a dual detection electrode. According to the sensor, differential calculation can be carried out by utilizing detection signals of the double detection electrodes, the coupling effect of temperature on the sensor is eliminated, so that the measurement precision of the sensor can be greatly improved, high-precision and temperature-coupled pressure measurement is realized, and the sensor has the advantages of high measurement precision, strong anti-interference capability, easiness in pac</description><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjEEKwjAURLtxIeodvgfoohTFLktRXLnqvoRmYgPp_yE_vb8RPICrGYb3Zl9hxBqRTN4S6lm2GGBJg7ee3-R8WMl655DA2ZtACSpsOFMsTYtDClZJZNh-t2jKlRemFXkRS3kpqrhjtXMmKE6_PFTnx30cnjWiTNBoZjDyNLya5nK9tW3X9e0_zAfeXkCP</recordid><startdate>20230203</startdate><enddate>20230203</enddate><creator>CHE YANXIAN</creator><scope>EVB</scope></search><sort><creationdate>20230203</creationdate><title>Temperature-coupled sliding film differential resonant pressure sensor and preparation method thereof</title><author>CHE YANXIAN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN115683399A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CHE YANXIAN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHE YANXIAN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Temperature-coupled sliding film differential resonant pressure sensor and preparation method thereof</title><date>2023-02-03</date><risdate>2023</risdate><abstract>The invention discloses a temperature-coupled sliding film differential resonant pressure sensor and a preparation method thereof, the sensor comprises a pressure guide glass layer, a pressure sensitive film layer and a resonant structure layer which are sequentially connected from bottom to top, and an aluminum film is arranged on the surface of a detection electrode of the resonant structure layer to form a temperature-sensitive composite detection electrode. And the detection electrode and the other detection electrode form a dual detection electrode. According to the sensor, differential calculation can be carried out by utilizing detection signals of the double detection electrodes, the coupling effect of temperature on the sensor is eliminated, so that the measurement precision of the sensor can be greatly improved, high-precision and temperature-coupled pressure measurement is realized, and the sensor has the advantages of high measurement precision, strong anti-interference capability, easiness in pac</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN115683399A |
| source | esp@cenet |
| subjects | MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING |
| title | Temperature-coupled sliding film differential resonant pressure sensor and preparation method thereof |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-24T07%3A52%3A33IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CHE%20YANXIAN&rft.date=2023-02-03&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN115683399A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |