Temperature-coupled sliding film differential resonant pressure sensor and preparation method thereof

The invention discloses a temperature-coupled sliding film differential resonant pressure sensor and a preparation method thereof, the sensor comprises a pressure guide glass layer, a pressure sensitive film layer and a resonant structure layer which are sequentially connected from bottom to top, and an aluminum film is arranged on the surface of a detection electrode of the resonant structure layer to form a temperature-sensitive composite detection electrode. And the detection electrode and the other detection electrode form a dual detection electrode. According to the sensor, differential calculation can be carried out by utilizing detection signals of the double detection electrodes, the coupling effect of temperature on the sensor is eliminated, so that the measurement precision of the sensor can be greatly improved, high-precision and temperature-coupled pressure measurement is realized, and the sensor has the advantages of high measurement precision, strong anti-interference capability, easiness in pac