Multi-element laminated structure hard coating and preparation method thereof

The invention discloses a multi-element laminated structure hard coating and a method for preparing the multi-element laminated structure hard coating by utilizing reaction magnetic control multi-arc coil vacuum coating equipment. The method comprises the following steps: a) purifying and ultrasonic...

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Bibliographische Detailangaben
Hauptverfasser: PAN ZHENQIANG, SHI HUAFENG, ZHU HUIQIN, PAN YOUMING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a multi-element laminated structure hard coating and a method for preparing the multi-element laminated structure hard coating by utilizing reaction magnetic control multi-arc coil vacuum coating equipment. The method comprises the following steps: a) purifying and ultrasonically cleaning a substrate; b) performing gas discharge bombardment on the surface of the substrate to remove impurities and oil stains on the surface of the substrate and activate the surface; c) forming a hard coating with a multi-element laminated structure on the surface of the substrate by adopting reaction magnetic control multi-arc coil vacuum coating equipment under a certain air pressure condition; the hard coating with the multi-element laminated structure is composed of two or more film layers of CrAlSiN, TiAlN, CrAlN and Cr. The whole preparation technology is simple in process and high in operability, the coating technology is completed in a vacuum chamber, the technology is energy-saving, green and env