Flat high density aluminum capacitors for stacking and embedding

Multi-terminal capacitor devices and methods of making multi-terminal capacitor devices are described herein. A multi-terminal capacitor device may include a plurality of individual capacitors, such as high surface area capacitors, arranged in a single device layer. A separate capacitor may include...

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Bibliographische Detailangaben
Hauptverfasser: DE PROSPO BRUNO, GOPALASWAMY RAJEEV, RAY URMI, BECK, THOMAS, J, TIMMS CHRIS, DAS KARIM, PICKENS MICHAEL, ZHU, DANHUA, SUNDARAM, VASANTH, PURUGOWDA, MADHUSUDHAN, LIN JUIING
Format: Patent
Sprache:chi ; eng
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