Flat high density aluminum capacitors for stacking and embedding

Multi-terminal capacitor devices and methods of making multi-terminal capacitor devices are described herein. A multi-terminal capacitor device may include a plurality of individual capacitors, such as high surface area capacitors, arranged in a single device layer. A separate capacitor may include an aluminum foil-based electrode, an aluminum oxide dielectric layer conformal with the aluminum foil-based electrode, and a conductive material electrode, such as a conductive polymer or conductive ceramic, in conformal contact with the dielectric layer. 本文描述了多端子电容器装置和制造多端子电容器装置的方法。多端子电容器装置可以包括布置在单个装置层中的多个单独的电容器，诸如高表面积电容器。单独的电容器可以包括基于铝箔的电极、与基于铝箔的电极共形的氧化铝介电层以及与介电层以共形方式接触的导电材料电极，诸如导电聚合物或导电陶瓷。