Electrode assembly and plasma device

The invention relates to an electrode assembly which is used for being connected with a high-voltage line of input voltage in plasma equipment and comprises a wiring terminal used for being connected with the high-voltage line, and one end, away from the high-voltage line, of the wiring terminal is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	XU JIANGLIN, ZHU HUAIWEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	The invention relates to an electrode assembly which is used for being connected with a high-voltage line of input voltage in plasma equipment and comprises a wiring terminal used for being connected with the high-voltage line, and one end, away from the high-voltage line, of the wiring terminal is provided with a connecting part of a sheet-shaped structure; a threading hole is formed in one end of the electrode body, a side opening groove is formed in the side portion of the electrode body, and the threading hole extends to be communicated with the interior of the side opening groove; and the wire pressing terminal is fixedly arranged in the side slot and is used for pressing and connecting the wiring terminal penetrating through the threading hole to the electrode body, so that the two surfaces of the connecting part are respectively in surface contact with the bottom surface of the side slot and the wire pressing terminal. The side slot is filled with the wire pressing terminal, so that the electrode body