Control method and device for load system of semiconductor temperature control equipment

The invention provides a control method and device for a load system of semiconductor temperature control equipment. The method comprises the steps that temperature data and flow data of circulating liquid of a machine table in a loaded state are collected; determining heat values of a heater in the load system at different sampling moments according to the temperature data and the flow data; according to the heat values of the heater at different sampling moments and the heat parameters of the heater, duty ratios of the heater at different sampling moments are determined; and controlling the on-off of the heater according to the duty ratios of the heater at different sampling moments. According to the invention, the heat value of the heater is determined by using the temperature data and the flow data collected on site, then the duty ratio is determined by using the heat value and the heater power, and the on-off of the heater is controlled by setting the duty ratio of the heater, so that the consistency of