Tool and method for measuring mirror alignment of laser interferometer

The invention relates to a laser interferometer measurement mirror alignment tool and method. The tool comprises a bottom plate and an adjusting mechanism. The bottom plate comprises a laser interferometer fixing area and a lens group fixing area; the adjusting mechanism is connected with the bottom...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YANG JUNWEI, HE HAILIANG, GU RUNWEI, LIU YUTAO, GONG BOHUA, WANG CHENG, HU JIANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates to a laser interferometer measurement mirror alignment tool and method. The tool comprises a bottom plate and an adjusting mechanism. The bottom plate comprises a laser interferometer fixing area and a lens group fixing area; the adjusting mechanism is connected with the bottom plate and used for supporting the bottom plate, and when the tool is arranged on a horizontal datum plane, the adjusting mechanism is further used for adjusting the height and levelness of the bottom plate; the laser interferometer fixing area is used for installing and fixing a laser interferometer, the lens group fixing area is used for installing and fixing a lens group, the lens group comprises a linear spectroscope and two linear reflectors, and an emission lens of the laser interferometer and the linear spectroscope in the lens group are located on the same straight line after installation and fixing. Light emitted by the laser interferometer is reflected by a linear reflector installed on the linear spectro