Method and device for preparing high-purity trisilyl amine

The invention provides a method and a device for preparing high-purity trimethylsilyl amine, which are characterized in that after monochlorosilane and an alkane solvent are mixed at low temperature, a four-in-one reactor integrating intelligent temperature control, stirring, heating and closed filt...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHANG XIN, ZHAO XIONG, FAN HUIFENG, LIU JIANHUA, MAO XICHEN, WAN YE, YUAN ZHENJUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM CHEMISTRY METALLURGY ORGANIC CHEMISTRY
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