Pressure sensor corrugated diaphragm welding seam leak detection device and leak detection method

The invention relates to the field of detection devices, in particular to a pressure sensor corrugated diaphragm welding seam leak detection device and leak detection method. The invention provides a pressure sensor corrugated diaphragm welding seam leak detection device in the first aspect, and the...

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Bibliographische Detailangaben
Hauptverfasser: ZHANG HAIJUN, LI HONGRU, WANG PENG, JIA WENBO, LI YONGQING, JIN QI, XU HAINING, LIU BO, HU YANLI, LI YING, ZHANG NA, LYU CHENGJUN, SHEN AN'AN, HE FANG, LI LINFENG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to the field of detection devices, in particular to a pressure sensor corrugated diaphragm welding seam leak detection device and leak detection method. The invention provides a pressure sensor corrugated diaphragm welding seam leak detection device in the first aspect, and the device comprises a detection seat which comprises a detection cover and a lower detection seat; after the detection cover and the lower detection seat are buckled, a diaphragm inner cavity is formed between the metal corrugated diaphragm on the pressure sensor and the detection cover in the inner cavity of the detection seat, and a diaphragm outer cavity is formed between the metal corrugated diaphragm and the inner wall of a compression ring on the pressure sensor; and a leak detection cavity is formed among the outer wall of the compression ring, the inner wall of the lower detection seat and part of the sensor shell. The miniature vacuum pump and the helium gas storage tank are communicated with the gas inlet h