VAPOR DEPOSITION MASK, ASSEMBLY, DEVICE, DISPLAY DEVICE, AND METHOD AND DEVICE FOR MANUFACTURING THE SAME

The invention provides an evaporation mask manufacturing method, which comprises the following steps of: providing a metal coiled material, the thickness T of which meets the relational expression: T is more than or equal to 5 microns and less than or equal to 40 microns; dry film light resistors ar...

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1. Verfasser: LAN QIULIANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides an evaporation mask manufacturing method, which comprises the following steps of: providing a metal coiled material, the thickness T of which meets the relational expression: T is more than or equal to 5 microns and less than or equal to 40 microns; dry film light resistors are attached to the upper surface and the lower surface of the metal coiled material in a vacuum mode respectively, and the dry film light resistors are patterned through exposure and development; etching the upper surface through the patterned dry film photoresist to form a first surface side, and laminating resin on the first surface side in a vacuum manner to fill the first concave part; the lower surface is etched through the patterned dry film photoresist to form a second surface side, a longitudinal section perpendicular to the upper surface and the lower surface is defined, the width of the longitudinal section of the first opening is D, the width of the longitudinal section of the through hole is F, and the r