Design method and device of three-dimensional integrated device, computer equipment and storage medium

The invention relates to the technical field of integrated circuits, in particular to a design method and device of a three-dimensional integrated device, computer equipment and a storage medium. The method comprises the steps of obtaining theoretical parameters of a target device, inputting the the...

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Bibliographische Detailangaben
Hauptverfasser: QU CHENBING, CHEN SI, WANG LIWEI, EN YUNFEI, SUN CHEN, HOU BO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of integrated circuits, in particular to a design method and device of a three-dimensional integrated device, computer equipment and a storage medium. The method comprises the steps of obtaining theoretical parameters of a target device, inputting the theoretical parameters into a simulation model, and obtaining theoretical characteristics output by the simulation model; obtaining defect parameters of a sample device prepared according to the theoretical parameters, inputting the defect parameters and the theoretical parameters into the simulation model, and obtaining production characteristics output by the simulation model; and determining an optimization dimension according to the theoretical characteristics and the production characteristics. The research and development effectiveness of the three-dimensional integrated device can be improved. 本申请涉及集成电路技术领域,特别是涉及一种三维集成器件的设计方法、装置、计算机设备和存储介质。该方法包括:获取目标器件的理论参数,将理论参数输入至仿真模型中,获取仿真模型输出的理论特性;获取根据理论参数制备的样本器件的缺陷参数,并将缺陷参