Preparation process of aluminum-scandium alloy target material

The invention discloses a preparation process of an aluminum-scandium alloy target material, relates to the field of semiconductor target material preparation, and aims to solve the problem that the preparation quality of the current scandium alloy target material is not high enough. The technical s...

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Hauptverfasser:	ZHU BIN, CHENG YINBING, GU ZONGHUI, ZHUANG ZHIJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ALLOYS CASTING CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS ANDNON-FERROUS ALLOYS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVINGMATERIAL METALLURGY PERFORMING OPERATIONS POWDER METALLURGY PUNCHING METAL ROLLING OF METAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS WORKING METALLIC POWDER
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Beschreibung
Zusammenfassung:	The invention discloses a preparation process of an aluminum-scandium alloy target material, relates to the field of semiconductor target material preparation, and aims to solve the problem that the preparation quality of the current scandium alloy target material is not high enough. The technical scheme is characterized by comprising the following steps: selecting metal aluminum with the purity of 99.999% and metal scandium with the purity of 99.99%, putting aluminum-scandium raw materials into a vacuum melting furnace, and melting the aluminum-scandium raw materials in the vacuum melting furnace; heating the vacuum smelting furnace to melt the aluminum-scandium alloy raw material in the smelting furnace; inert gas is introduced into the vacuum melting furnace, gas impurities are removed, and finally the alloy is obtained; casting in a vacuum state, cooling and sizing to obtain an alloy ingot, and rolling by using a hot mill; the leveled high-purity aluminum-scandium alloy target material is subjected to ann