Warm-up method for substrate processing apparatus and computer program therefor

The invention provides a preheating method of a substrate processing apparatus capable of shortening preheating time and simultaneously performing maintenance operation, and a computer program used for the method. The preheating method of the substrate processing apparatus includes: setting parameters related to preheating of a preheating object constituting the substrate processing apparatus; the preheating object is preheated based on the parameters, and the moving range of the preheating object is limited in the movable range. 本发明提供了能够缩短预热时间并且能够同时执行维护操作的基板处理装置的预热方法及用于该方法的计算机程序。所述基板处理装置的预热方法包括：设定与构成基板处理装置的预热对象的预热相关的参数；以及基于参数对预热对象进行预热的步骤，其中，预热对象的移动范围限于可移动范围内。