Method and device for stripping silicon carbide crystal ingot by laser

The invention discloses a method and device for stripping a silicon carbide crystal ingot by laser, and the method comprises the following steps: firstly, aligning a laser focus to a preset plane in the crystal ingot, and carrying out secondary laser processing on the preset plane by laser according...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI ZHAOYAN, HUANG YAO'AN, XIE XIAOZHU, LYU KAIJUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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