Recovery device for preparing electronic-grade TFT (Thin Film Transistor) developing solution
The invention relates to the technical field of developing solution recycling, in particular to a recycling device for preparing electronic-grade TFT developing solution, which comprises a recycling box and a water tank, a filter box is mounted on the upper end face of the recycling box, and an inne...
Gespeichert in:
| Hauptverfasser: | , , , , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | LIU SHUIXING ZHANG YONGBIAO LUO YONGCHUN LUO SHUANG GUO XIANZHEN |
| description | The invention relates to the technical field of developing solution recycling, in particular to a recycling device for preparing electronic-grade TFT developing solution, which comprises a recycling box and a water tank, a filter box is mounted on the upper end face of the recycling box, and an inner wall automatic cleaning mechanism is mounted on the inner wall of the recycling box. The problems that when an existing recovery device for the electronic-grade TFT developing solution is used for recovering the developing solution, the recovery device needs to be connected with a developing solution outlet pipe for material receiving, and due to the fact that a pipe body and the inner wall of the recovery device make contact with the developing solution, if the pipe body and the inner wall are not flushed or cleaned in time after material receiving and recovery, the developing solution is not recovered in time are solved. The problem that the inner wall of the recovery device is damaged due to corrosion caused b |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN115591873A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN115591873A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN115591873A3</originalsourceid><addsrcrecordid>eNqNjLEKwjAURbs4iPoPz02HDqUUdZRicHKQrFJCelsDMS-8xIJ_LwU_wOks55xl8bjD8gT5UI_JWdDAQlEQjbgwEjxsFg7OlqOYHqSVpp1-ukDK-RdpMSG5lFn28wCe45wl9u_sOKyLxWB8wubHVbFVF91eS0TukKKxCMhde6uqpjlVx0N9rv9xvsscO_c</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Recovery device for preparing electronic-grade TFT (Thin Film Transistor) developing solution</title><source>esp@cenet</source><creator>LIU SHUIXING ; ZHANG YONGBIAO ; LUO YONGCHUN ; LUO SHUANG ; GUO XIANZHEN</creator><creatorcontrib>LIU SHUIXING ; ZHANG YONGBIAO ; LUO YONGCHUN ; LUO SHUANG ; GUO XIANZHEN</creatorcontrib><description>The invention relates to the technical field of developing solution recycling, in particular to a recycling device for preparing electronic-grade TFT developing solution, which comprises a recycling box and a water tank, a filter box is mounted on the upper end face of the recycling box, and an inner wall automatic cleaning mechanism is mounted on the inner wall of the recycling box. The problems that when an existing recovery device for the electronic-grade TFT developing solution is used for recovering the developing solution, the recovery device needs to be connected with a developing solution outlet pipe for material receiving, and due to the fact that a pipe body and the inner wall of the recovery device make contact with the developing solution, if the pipe body and the inner wall are not flushed or cleaned in time after material receiving and recovery, the developing solution is not recovered in time are solved. The problem that the inner wall of the recovery device is damaged due to corrosion caused b</description><language>chi ; eng</language><subject>CLEANING ; CLEANING IN GENERAL ; PERFORMING OPERATIONS ; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL ; PREVENTION OF FOULING IN GENERAL ; SEPARATION ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230113&DB=EPODOC&CC=CN&NR=115591873A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230113&DB=EPODOC&CC=CN&NR=115591873A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LIU SHUIXING</creatorcontrib><creatorcontrib>ZHANG YONGBIAO</creatorcontrib><creatorcontrib>LUO YONGCHUN</creatorcontrib><creatorcontrib>LUO SHUANG</creatorcontrib><creatorcontrib>GUO XIANZHEN</creatorcontrib><title>Recovery device for preparing electronic-grade TFT (Thin Film Transistor) developing solution</title><description>The invention relates to the technical field of developing solution recycling, in particular to a recycling device for preparing electronic-grade TFT developing solution, which comprises a recycling box and a water tank, a filter box is mounted on the upper end face of the recycling box, and an inner wall automatic cleaning mechanism is mounted on the inner wall of the recycling box. The problems that when an existing recovery device for the electronic-grade TFT developing solution is used for recovering the developing solution, the recovery device needs to be connected with a developing solution outlet pipe for material receiving, and due to the fact that a pipe body and the inner wall of the recovery device make contact with the developing solution, if the pipe body and the inner wall are not flushed or cleaned in time after material receiving and recovery, the developing solution is not recovered in time are solved. The problem that the inner wall of the recovery device is damaged due to corrosion caused b</description><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>SEPARATION</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjLEKwjAURbs4iPoPz02HDqUUdZRicHKQrFJCelsDMS-8xIJ_LwU_wOks55xl8bjD8gT5UI_JWdDAQlEQjbgwEjxsFg7OlqOYHqSVpp1-ukDK-RdpMSG5lFn28wCe45wl9u_sOKyLxWB8wubHVbFVF91eS0TukKKxCMhde6uqpjlVx0N9rv9xvsscO_c</recordid><startdate>20230113</startdate><enddate>20230113</enddate><creator>LIU SHUIXING</creator><creator>ZHANG YONGBIAO</creator><creator>LUO YONGCHUN</creator><creator>LUO SHUANG</creator><creator>GUO XIANZHEN</creator><scope>EVB</scope></search><sort><creationdate>20230113</creationdate><title>Recovery device for preparing electronic-grade TFT (Thin Film Transistor) developing solution</title><author>LIU SHUIXING ; ZHANG YONGBIAO ; LUO YONGCHUN ; LUO SHUANG ; GUO XIANZHEN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN115591873A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>SEPARATION</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>LIU SHUIXING</creatorcontrib><creatorcontrib>ZHANG YONGBIAO</creatorcontrib><creatorcontrib>LUO YONGCHUN</creatorcontrib><creatorcontrib>LUO SHUANG</creatorcontrib><creatorcontrib>GUO XIANZHEN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LIU SHUIXING</au><au>ZHANG YONGBIAO</au><au>LUO YONGCHUN</au><au>LUO SHUANG</au><au>GUO XIANZHEN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Recovery device for preparing electronic-grade TFT (Thin Film Transistor) developing solution</title><date>2023-01-13</date><risdate>2023</risdate><abstract>The invention relates to the technical field of developing solution recycling, in particular to a recycling device for preparing electronic-grade TFT developing solution, which comprises a recycling box and a water tank, a filter box is mounted on the upper end face of the recycling box, and an inner wall automatic cleaning mechanism is mounted on the inner wall of the recycling box. The problems that when an existing recovery device for the electronic-grade TFT developing solution is used for recovering the developing solution, the recovery device needs to be connected with a developing solution outlet pipe for material receiving, and due to the fact that a pipe body and the inner wall of the recovery device make contact with the developing solution, if the pipe body and the inner wall are not flushed or cleaned in time after material receiving and recovery, the developing solution is not recovered in time are solved. The problem that the inner wall of the recovery device is damaged due to corrosion caused b</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN115591873A |
| source | esp@cenet |
| subjects | CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PREVENTION OF FOULING IN GENERAL SEPARATION TRANSPORTING |
| title | Recovery device for preparing electronic-grade TFT (Thin Film Transistor) developing solution |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-04T15%3A53%3A31IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=LIU%20SHUIXING&rft.date=2023-01-13&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN115591873A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |