Recovery device for preparing electronic-grade TFT (Thin Film Transistor) developing solution

The invention relates to the technical field of developing solution recycling, in particular to a recycling device for preparing electronic-grade TFT developing solution, which comprises a recycling box and a water tank, a filter box is mounted on the upper end face of the recycling box, and an inne...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU SHUIXING, ZHANG YONGBIAO, LUO YONGCHUN, LUO SHUANG, GUO XIANZHEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of developing solution recycling, in particular to a recycling device for preparing electronic-grade TFT developing solution, which comprises a recycling box and a water tank, a filter box is mounted on the upper end face of the recycling box, and an inner wall automatic cleaning mechanism is mounted on the inner wall of the recycling box. The problems that when an existing recovery device for the electronic-grade TFT developing solution is used for recovering the developing solution, the recovery device needs to be connected with a developing solution outlet pipe for material receiving, and due to the fact that a pipe body and the inner wall of the recovery device make contact with the developing solution, if the pipe body and the inner wall are not flushed or cleaned in time after material receiving and recovery, the developing solution is not recovered in time are solved. The problem that the inner wall of the recovery device is damaged due to corrosion caused b