Monolithic heterogeneous integrated optical parametric amplification chip

The invention discloses a monolithic heterogeneous integrated optical parametric amplification chip, which comprises a substrate, a lower cladding, a lithium niobate film flat optical waveguide, an optical parametric amplification transmission optical path layer, an upper cladding and a pump laser epitaxial layer, the optical parametric amplification transmission optical path layer comprises a pump light coupling optical waveguide, a pump light transmission optical waveguide, a signal light input spot-size converter, a signal light transmission optical waveguide, a pump light signal optical coupler, a periodically poled lithium niobate film optical waveguide, a signal light demultiplexer and a signal light output spot-size converter. According to the invention, the amplification of input signal light can be realized on a single chip, and the amplifier has the advantages of high integration, low noise, high gain and low insertion loss. 本发明公开了一种单片异质集成光参量放大芯片，包括衬底、下包层、铌酸锂薄膜平板光波导、光参量放大传输光路层、上包层及泵浦激光器外延层，光参量放大传输光路