Method for measuring micro-motion speed of object by using interference method

The invention discloses a method for measuring the micro-motion speed of an object by using an interference method, which comprises an interference measurement system and a detection mirror, the detection mirror is arranged on the moving end of the object, and the interference measurement system measures the surface of the detection mirror and records the aperture change number and the corresponding counting time. The moving speed is calculated according to the aperture change number and the corresponding counting time, the moving speed = the aperture change number * the half-wavelength size/the air refractive index/the counting time, and the half-wavelength size is the laser wavelength size of the interference measurement system. According to the invention, the micro motion speed can be accurately measured, and the high-precision operation environment can be satisfied. 本发明公开了一种用干涉法测量物体微运动速度的方法，包括干涉测量系统和检测镜，所述检测镜设置在物体的移动端上，所述干涉测量系统对检测镜表面进行测量，并记录光圈变化数量和对应的计数时间，根据光圈变化数量和对应的计数时间计算移动速度，移动速度＝光圈变化数量*半波长尺寸/空气折射率/计数时