Inspection apparatus and inspection method

The invention provides an inspection device and an inspection method capable of shortening measurement time. The inspection apparatus includes: an electric power supply unit that applies a predetermined output voltage to a plurality of objects to be inspected; a switching unit that switches the obje...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUREBAYASHI SHINYA, ISHII SHIGEKI, NARIKAWA KENICHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides an inspection device and an inspection method capable of shortening measurement time. The inspection apparatus includes: an electric power supply unit that applies a predetermined output voltage to a plurality of objects to be inspected; a switching unit that switches the object to be inspected, the current of which is to be measured; a measuring unit that measures the current of the subject selected by the switching unit; and a control unit that controls the switching unit, the control unit switching, on the basis of a set value for current measurement that has been set, between a sequential mode in which the current measurement is performed on a single subject for a predetermined number of times, and a scanning mode in which the current measurement is performed on the single subject for a predetermined number of times. The scanning mode is a mode in which the switching unit is switched to perform a predetermined number of times of current measurement on another object to be inspected,