Furnace body thermal field and large-size germanium single crystal growth process
The invention provides a furnace body thermal field and a large-size germanium single crystal growth process, and designs and optimizes a large-size (300mm) germanium single crystal growth process. Through an analogue simulation technology and a crystal pulling test technology, thermal field materia...
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| creator | WANG YUNPENG CUI DINGFANG KO KOHEI WANG TONGBO HAN SHUAIMIN ZHANG SHIBO MIAO YANMEI ZHANG WENZEXI CHEN JUNXIAO SUN YAN |
| description | The invention provides a furnace body thermal field and a large-size germanium single crystal growth process, and designs and optimizes a large-size (300mm) germanium single crystal growth process. Through an analogue simulation technology and a crystal pulling test technology, thermal field material selection, thermal field component size, water cooling strength, insulation felt arrangement and the like are optimized, and a furnace body thermal field with a crucible/crystal diameter ratio smaller than 2.0 is developed; under the condition of the thermal field, a power and pulling speed heater temperature cooperative control process at the shouldering stage, the shoulder rotating stage, the equal-diameter stage and the ending stage is optimized, so that growth of the large-size infrared germanium single crystal is efficiently completed in the furnace body thermal field with the crucible/crystal diameter ratio smaller than 2.0, and the method is applied to long-distance infrared detection.
本发明提出了一种炉体热场及大尺寸锗单晶生 |
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本发明提出了一种炉体热场及大尺寸锗单晶生</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL |
| title | Furnace body thermal field and large-size germanium single crystal growth process |
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