Furnace body thermal field and large-size germanium single crystal growth process

The invention provides a furnace body thermal field and a large-size germanium single crystal growth process, and designs and optimizes a large-size (300mm) germanium single crystal growth process. Through an analogue simulation technology and a crystal pulling test technology, thermal field materia...

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Hauptverfasser: WANG YUNPENG, CUI DINGFANG, KO KOHEI, WANG TONGBO, HAN SHUAIMIN, ZHANG SHIBO, MIAO YANMEI, ZHANG WENZEXI, CHEN JUNXIAO, SUN YAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a furnace body thermal field and a large-size germanium single crystal growth process, and designs and optimizes a large-size (300mm) germanium single crystal growth process. Through an analogue simulation technology and a crystal pulling test technology, thermal field material selection, thermal field component size, water cooling strength, insulation felt arrangement and the like are optimized, and a furnace body thermal field with a crucible/crystal diameter ratio smaller than 2.0 is developed; under the condition of the thermal field, a power and pulling speed heater temperature cooperative control process at the shouldering stage, the shoulder rotating stage, the equal-diameter stage and the ending stage is optimized, so that growth of the large-size infrared germanium single crystal is efficiently completed in the furnace body thermal field with the crucible/crystal diameter ratio smaller than 2.0, and the method is applied to long-distance infrared detection. 本发明提出了一种炉体热场及大尺寸锗单晶生