LIQUID SUPPLY DEVICE AND POLISHING APPARATUS

The invention relates to a liquid supply device and a grinding device. The liquid supply device includes a first arm having a first nozzle, a second arm having a second nozzle, a first rotation shaft supporting a base end portion of the first arm, a second rotation shaft supporting a base end portio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAMURA MOTONARI, ISOBE SOICHI, SHINKAI TAKESHI, YAMAGUCHI KUNIAKI, MOCHIDA YUSUKE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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