FLUID CONTROL DEVICE, FLUID CONTROL SYSTEM, RECORDING MEDIUM, AND FLUID CONTROL METHOD

In order to prevent an unnatural behavior of a calculated flow rate output from fluid control, a fluid control device is provided with a fluid control valve and upstream and downstream pressure sensors in a flow path, and is provided with: an actual flow rate calculation unit that calculates an actu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUMOTO SOTA, MATSUURA KAZUHIRO, NAGAI, KENTARO, HISAMORI YOSUKE
Format: Patent
Sprache:chi ; eng
Schlagworte:
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