FLUID CONTROL DEVICE, FLUID CONTROL SYSTEM, RECORDING MEDIUM, AND FLUID CONTROL METHOD
In order to prevent an unnatural behavior of a calculated flow rate output from fluid control, a fluid control device is provided with a fluid control valve and upstream and downstream pressure sensors in a flow path, and is provided with: an actual flow rate calculation unit that calculates an actu...
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Format: | Patent |
Sprache: | chi ; eng |
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