FLUID CONTROL DEVICE, FLUID CONTROL SYSTEM, RECORDING MEDIUM, AND FLUID CONTROL METHOD
In order to prevent an unnatural behavior of a calculated flow rate output from fluid control, a fluid control device is provided with a fluid control valve and upstream and downstream pressure sensors in a flow path, and is provided with: an actual flow rate calculation unit that calculates an actu...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | In order to prevent an unnatural behavior of a calculated flow rate output from fluid control, a fluid control device is provided with a fluid control valve and upstream and downstream pressure sensors in a flow path, and is provided with: an actual flow rate calculation unit that calculates an actual flow rate; calculating the flow according to the measured pressure of the upstream and downstream side pressure sensors; and a flow rate output unit for outputting the calculated flow rate calculated by the actual flow rate calculation unit, the flow rate output unit exerting a zero output function for outputting a zero value regardless of the calculated flow rate when it is determined that the fluid control valve is in a closed state, and the flow rate control device is further provided with a switching unit for switching between execution and stop of the zero output function of the flow rate output unit. When the fluid control valve is in an open state and a difference obtained by subtracting the downstream-si |
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