Integrated circuit, semiconductor structure and forming method thereof

An integrated circuit (IC) and a method of forming the same are provided. The integrated circuit includes a substrate; the conductive layer is configured on the substrate; the barrier layer is disposed on the conductive layer. An etch stop layer covering sidewalls of the barrier layer and extending...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI MINGZHE, CHEN SHENGZHAO, CAI ZHENGYUAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:An integrated circuit (IC) and a method of forming the same are provided. The integrated circuit includes a substrate; the conductive layer is configured on the substrate; the barrier layer is disposed on the conductive layer. An etch stop layer covering sidewalls of the barrier layer and extending over a first portion of a top surface of the barrier layer; and at least one capacitor structure disposed on the second portion of the top surface of the barrier layer. 提供了一种集成电路(IC)及其形成方法。该集成电路包括衬底;导电层配置在衬底上;阻障层配置在导电层上;刻蚀停止层覆盖阻障层的侧壁且在阻障层的顶面的第一部分上延伸;以及至少一电容器结构配置在阻障层的顶面的第二部分上。