Integrated circuit, semiconductor structure and forming method thereof
An integrated circuit (IC) and a method of forming the same are provided. The integrated circuit includes a substrate; the conductive layer is configured on the substrate; the barrier layer is disposed on the conductive layer. An etch stop layer covering sidewalls of the barrier layer and extending...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | An integrated circuit (IC) and a method of forming the same are provided. The integrated circuit includes a substrate; the conductive layer is configured on the substrate; the barrier layer is disposed on the conductive layer. An etch stop layer covering sidewalls of the barrier layer and extending over a first portion of a top surface of the barrier layer; and at least one capacitor structure disposed on the second portion of the top surface of the barrier layer.
提供了一种集成电路(IC)及其形成方法。该集成电路包括衬底;导电层配置在衬底上;阻障层配置在导电层上;刻蚀停止层覆盖阻障层的侧壁且在阻障层的顶面的第一部分上延伸;以及至少一电容器结构配置在阻障层的顶面的第二部分上。 |
---|