Vacuum pump mounting structure, vacuum pump mounting method, and semiconductor device processing apparatus

The invention provides a vacuum pump mounting structure, a vacuum pump mounting method and a semiconductor device processing apparatus. The mounting structure comprises a fixed part and a movable part. The first end of the fixed part is fixedly connected with the reaction cavity, and the second end...

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Bibliographische Detailangaben
1. Verfasser:	LI QINBO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING BRAKES CLUTCHES COUPLINGS FOR TRANSMITTING ROTATION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS SEMICONDUCTOR DEVICES THERMAL INSULATION IN GENERAL WEAPONS
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