Vacuum pump mounting structure, vacuum pump mounting method, and semiconductor device processing apparatus
The invention provides a vacuum pump mounting structure, a vacuum pump mounting method and a semiconductor device processing apparatus. The mounting structure comprises a fixed part and a movable part. The first end of the fixed part is fixedly connected with the reaction cavity, and the second end...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention provides a vacuum pump mounting structure, a vacuum pump mounting method and a semiconductor device processing apparatus. The mounting structure comprises a fixed part and a movable part. The first end of the fixed part is fixedly connected with the reaction cavity, and the second end of the fixed part is provided with an annular boss and is movably connected with the first end of the movable part through the annular boss. The first end of the movable part is provided with a limiting ring and is movably connected with the fixed part through the limiting ring. The second end of the movable part is fixedly connected with a vacuum pump. The movable part is provided with an elastic part in the rotating direction of a rotor of the vacuum pump. And the elastic piece is provided with a limiting piece on a rotating path of the fixing piece. And in response to rotation of the vacuum pump, the vacuum pump drives the elastic piece to move on the rotation path in the rotation direction through the movable p |
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