Corrosive liquid as well as preparation method and application thereof
The invention belongs to the technical field of material processing, and provides a corrosive liquid and a preparation method and application thereof.The corrosive liquid comprises a first corrosive liquid body and a second corrosive liquid body which contain different components, through cooperatio...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention belongs to the technical field of material processing, and provides a corrosive liquid and a preparation method and application thereof.The corrosive liquid comprises a first corrosive liquid body and a second corrosive liquid body which contain different components, through cooperation of the two corrosive liquid bodies, subsurface damage of a corroded material can be effectively improved, and the corrosion resistance of the material is improved. Meanwhile, the corrosion rate of the corrosive liquid is uniform, water ripples, bright spots and other defects are avoided, the surface quality of the grinding sheet is improved, the surface roughness of a material corroded by the product does not exceed 0.7 mu m, the corroded surface is smooth and clean, and the requirements of subsequent processes such as polishing and cleaning can be met; the corrosion method provided by the invention is simple and convenient to operate, can be suitable for batch corrosion preparation of semiconductor materials, su |
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