Nanometer square ring-cylinder coupling structure array all-dielectric color filter

The invention discloses a nanometer square ring-cylinder coupling structure array all-dielectric color filter which is structurally composed of a silicon dioxide material serving as a substrate and a periodic dielectric nanometer array unit structure arranged on the substrate, and the structure is c...

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Bibliographische Detailangaben
Hauptverfasser: LAI ZIFAN, YANG HONGYAN, XIAO GONGLI, CHEN JIAYU, SUN TANGYOU, ZHANG FABI, CHEN YONGHE, WANG YANGPEIHUA, LI HAI'OU
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a nanometer square ring-cylinder coupling structure array all-dielectric color filter which is structurally composed of a silicon dioxide material serving as a substrate and a periodic dielectric nanometer array unit structure arranged on the substrate, and the structure is composed of a square ring and a cylinder arranged in the center of the square ring in a combined mode. The thickness of the square ring is 20nm, and the medium nano array is made of silicon; the substrate is rectangular, the height of the substrate is 60nm, and colors are filtered out by utilizing mie resonance of a light-excited silicon nanostructure and close correlation between wavelength and material size. According to the invention, the radius of the cylinder, the side length of the square ring, the height of the nanometer square ring and the nanometer column and the period of the array can be changed to change the periodic etching moment of the array so as to regulate and control the filtered color, and the fi