Feeding method for effectively inhibiting silicon splashing and silicon jumping of particle silicon

The invention discloses a charging method for effectively inhibiting silicon splashing and silicon jumping of particle silicon, which comprises the step of adjusting a particle silicon charging mode and a field process, and the adjustment of the particle silicon charging mode comprises the adjustmen...

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Hauptverfasser: WANG YAPU, WANG JUNLEI, WANG YICHENG
Format: Patent
Sprache:chi ; eng
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