Thin film deposition apparatus and thin film deposition method
Disclosed are a thin film deposition apparatus and a thin film deposition method, the thin film deposition apparatus comprising: a reaction vessel having a vacuum chamber, the reaction vessel being internally provided with a support capable of holding a substrate on a holding surface; the evaporatio...
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| creator | JIANG YOUSONG YANG YUN WANG HUAIMIN GU KANGXIN ZHENG BINGWEI DONG CHANGHAI |
| description | Disclosed are a thin film deposition apparatus and a thin film deposition method, the thin film deposition apparatus comprising: a reaction vessel having a vacuum chamber, the reaction vessel being internally provided with a support capable of holding a substrate on a holding surface; the evaporation coating mechanism is arranged in the vacuum cavity and is used for carrying out evaporation coating on the substrate, and the evaporation coating mechanism is arranged towards the holding surface; the sputter coating mechanism is arranged in the vacuum cavity and used for carrying out sputter coating on the substrate, and the sputter coating mechanism is arranged towards the holding surface; wherein the evaporation coating mechanism and the sputter coating mechanism are positioned on the same side of the bracket; the minimum distance between the sputter coating mechanism and the support is smaller than 20 cm and larger than 5 cm. According to the thin film deposition device and the thin film deposition method, ev |
| format | Patent |
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According to the thin film deposition device and the thin film deposition method, ev</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Thin film deposition apparatus and thin film deposition method |
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