Leaf type wafer cleaning machine

Leaf type wafer cleaning machine

The invention relates to the technical field of storages, in particular to a leaf type wafer cleaning machine which comprises two sets of vertical overturning arms, each set of vertical overturning arms is provided with a cleaning assembly, each cleaning assembly comprises two roller brushes, a driv...

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Hauptverfasser: ZHANG CHENG, CHEN YOUSHENG, LAI ZHANGTIAN, HE XIANHAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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creator ZHANG CHENG
CHEN YOUSHENG
LAI ZHANGTIAN
HE XIANHAN
description The invention relates to the technical field of storages, in particular to a leaf type wafer cleaning machine which comprises two sets of vertical overturning arms, each set of vertical overturning arms is provided with a cleaning assembly, each cleaning assembly comprises two roller brushes, a driven mechanism, a driving mechanism and a clutch mechanism, and each driven mechanism comprises a horizontal rotating shaft and two first bevel gears. The driving mechanism comprises a reciprocating lead screw pipe, a sliding block, a spline shaft and a second bevel gear, the clutch mechanism comprises a moving seat, a tension spring and a lifting rope, and when the two roller brushes located on the inner side rotate to clean the two sides of a wafer, the two first motors drive the two vertical rotating arms to turn over by 180 degrees correspondingly; the two roller brushes which are located on the outer side and are self-clean rotate to the inner side to continue to clean the wafer, the two roller brushes attached
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language chi ; eng
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subjects CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
title Leaf type wafer cleaning machine
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