Leaf type wafer cleaning machine
The invention relates to the technical field of storages, in particular to a leaf type wafer cleaning machine which comprises two sets of vertical overturning arms, each set of vertical overturning arms is provided with a cleaning assembly, each cleaning assembly comprises two roller brushes, a driv...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to the technical field of storages, in particular to a leaf type wafer cleaning machine which comprises two sets of vertical overturning arms, each set of vertical overturning arms is provided with a cleaning assembly, each cleaning assembly comprises two roller brushes, a driven mechanism, a driving mechanism and a clutch mechanism, and each driven mechanism comprises a horizontal rotating shaft and two first bevel gears. The driving mechanism comprises a reciprocating lead screw pipe, a sliding block, a spline shaft and a second bevel gear, the clutch mechanism comprises a moving seat, a tension spring and a lifting rope, and when the two roller brushes located on the inner side rotate to clean the two sides of a wafer, the two first motors drive the two vertical rotating arms to turn over by 180 degrees correspondingly; the two roller brushes which are located on the outer side and are self-clean rotate to the inner side to continue to clean the wafer, the two roller brushes attached |
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