Alignment nozzle clamp, method and system for centering photoresist coater arm

An alignment nozzle clamp is used for centering a photoresist coater arm comprising an alignment nozzle block. The alignment nozzle clamp further comprises an endoscope fixing piece which is removably fixed to the bottom of the alignment nozzle block; an endoscope; and an alignment mark removably coupled to the endoscope holder opposite the alignment nozzle block. The counterpoint nozzle clamp is removed from the nozzle slot by the coater arm and transferred to the center of the chuck in the associated process chamber. And aligning the photoresist coating machine arm with the center of the chuck by using the alignment mark through the endoscope. 一种对位喷嘴夹具，用于对包括对位喷嘴区块的光刻胶涂布机臂进行定心。对位喷嘴夹具还包括：内窥镜固持件，可移除地固定到对位喷嘴区块的底部；内窥镜；以及对位标记，与对位喷嘴区块相对地可移除地耦合到内窥镜固持件。对位喷嘴夹具由涂布机臂从喷嘴槽取出，并转移到相关联工艺室中的夹盘的中心。通过内窥镜，使用对位标记将光刻胶涂布机臂与夹盘的中心对位。