Substrate processing apparatus, substrate processing method, learning data generation method, learning method, learning apparatus, learning completion model generation method, and learning completion model

This substrate processing apparatus (100) is provided with a substrate holding unit (120), a chemical solution supply unit (130), a substrate information acquisition unit (22a), a chemical solution processing condition information acquisition unit (22b), and a control unit (22). A substrate informat...

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Hauptverfasser:	ANO SEIJI, KOJIMARU TOMONORI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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