Method for detecting sample and multi-electron beam detection system

A method for detecting a sample using a multi-electron beam detection system (100) is described. The method comprises: placing a sample on a movable platform (110) extending in an X-Y plane; generating a plurality of electron beams (105) propagating towards the sample; focusing an electron beam on t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NUNAN PETER, MUELLER BERNHARD G
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!