Method for detecting sample and multi-electron beam detection system

A method for detecting a sample using a multi-electron beam detection system (100) is described. The method comprises: placing a sample on a movable platform (110) extending in an X-Y plane; generating a plurality of electron beams (105) propagating towards the sample; focusing an electron beam on the sample at a plurality of detection locations (106) in the two-dimensional array; scanning the sample surface by moving the movable platform in a predetermined scanning pattern while maintaining the plurality of electron beams stationary; and detecting signal electrons emitted from the sample during movement of the movable platform for detecting the sample. Further, a multi-electron beam detection system (100) for detecting a sample according to the above method is described. 描述了一种用于使用多电子束检测系统(100)检测样品的方法。该方法包含：将样品放置于在X-Y平面延伸的可移动平台(110)上；产生向样品传播的多个电子束(105)；在二维阵列中的多个探测位置(106)处将电子束聚焦在该样品上；通过以预定扫描模式移动该可移动平台来扫描样品表面，同时保持多个电子束静止；以及检测在该可移动平台的移动期间从该样品发射的信号电子，以用于检测该样品。进一步地，描述了用于根据以上方法检测样品的多电子束检测系统(100)。