Method for detecting sample and multi-electron beam detection system
A method for detecting a sample using a multi-electron beam detection system (100) is described. The method comprises: placing a sample on a movable platform (110) extending in an X-Y plane; generating a plurality of electron beams (105) propagating towards the sample; focusing an electron beam on t...
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| creator | NUNAN PETER MUELLER BERNHARD G |
| description | A method for detecting a sample using a multi-electron beam detection system (100) is described. The method comprises: placing a sample on a movable platform (110) extending in an X-Y plane; generating a plurality of electron beams (105) propagating towards the sample; focusing an electron beam on the sample at a plurality of detection locations (106) in the two-dimensional array; scanning the sample surface by moving the movable platform in a predetermined scanning pattern while maintaining the plurality of electron beams stationary; and detecting signal electrons emitted from the sample during movement of the movable platform for detecting the sample. Further, a multi-electron beam detection system (100) for detecting a sample according to the above method is described.
描述了一种用于使用多电子束检测系统(100)检测样品的方法。该方法包含：将样品放置于在X-Y平面延伸的可移动平台(110)上；产生向样品传播的多个电子束(105)；在二维阵列中的多个探测位置(106)处将电子束聚焦在该样品上；通过以预定扫描模式移动该可移动平台来扫描样品表面，同时保持多个电子束静止；以及检测在该可移动平台的移动期间从该样品发射的信号电子，以用于检测该样品。进一步地，描述了用于根据以上方法检测样品的多电子束检测系统(100)。 |
| format | Patent |
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描述了一种用于使用多电子束检测系统(100)检测样品的方法。该方法包含：将样品放置于在X-Y平面延伸的可移动平台(110)上；产生向样品传播的多个电子束(105)；在二维阵列中的多个探测位置(106)处将电子束聚焦在该样品上；通过以预定扫描模式移动该可移动平台来扫描样品表面，同时保持多个电子束静止；以及检测在该可移动平台的移动期间从该样品发射的信号电子，以用于检测该样品。进一步地，描述了用于根据以上方法检测样品的多电子束检测系统(100)。</description><language>chi ; eng</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221202&DB=EPODOC&CC=CN&NR=115427798A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221202&DB=EPODOC&CC=CN&NR=115427798A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NUNAN PETER</creatorcontrib><creatorcontrib>MUELLER BERNHARD G</creatorcontrib><title>Method for detecting sample and multi-electron beam detection system</title><description>A method for detecting a sample using a multi-electron beam detection system (100) is described. The method comprises: placing a sample on a movable platform (110) extending in an X-Y plane; generating a plurality of electron beams (105) propagating towards the sample; focusing an electron beam on the sample at a plurality of detection locations (106) in the two-dimensional array; scanning the sample surface by moving the movable platform in a predetermined scanning pattern while maintaining the plurality of electron beams stationary; and detecting signal electrons emitted from the sample during movement of the movable platform for detecting the sample. Further, a multi-electron beam detection system (100) for detecting a sample according to the above method is described.
描述了一种用于使用多电子束检测系统(100)检测样品的方法。该方法包含：将样品放置于在X-Y平面延伸的可移动平台(110)上；产生向样品传播的多个电子束(105)；在二维阵列中的多个探测位置(106)处将电子束聚焦在该样品上；通过以预定扫描模式移动该可移动平台来扫描样品表面，同时保持多个电子束静止；以及检测在该可移动平台的移动期间从该样品发射的信号电子，以用于检测该样品。进一步地，描述了用于根据以上方法检测样品的多电子束检测系统(100)。</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHDxTS3JyE9RSMsvUkhJLUlNLsnMS1coTswtyElVSMxLUcgtzSnJ1E3NAcoU5ecpJKUm5sIUArnFlcUlqbk8DKxpiTnFqbxQmptB0c01xNlDN7UgPz61uCAxOTUvtSTe2c_Q0NTEyNzc0sLRmBg1ALzDMwQ</recordid><startdate>20221202</startdate><enddate>20221202</enddate><creator>NUNAN PETER</creator><creator>MUELLER BERNHARD G</creator><scope>EVB</scope></search><sort><creationdate>20221202</creationdate><title>Method for detecting sample and multi-electron beam detection system</title><author>NUNAN PETER ; MUELLER BERNHARD G</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN115427798A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>NUNAN PETER</creatorcontrib><creatorcontrib>MUELLER BERNHARD G</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NUNAN PETER</au><au>MUELLER BERNHARD G</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method for detecting sample and multi-electron beam detection system</title><date>2022-12-02</date><risdate>2022</risdate><abstract>A method for detecting a sample using a multi-electron beam detection system (100) is described. The method comprises: placing a sample on a movable platform (110) extending in an X-Y plane; generating a plurality of electron beams (105) propagating towards the sample; focusing an electron beam on the sample at a plurality of detection locations (106) in the two-dimensional array; scanning the sample surface by moving the movable platform in a predetermined scanning pattern while maintaining the plurality of electron beams stationary; and detecting signal electrons emitted from the sample during movement of the movable platform for detecting the sample. Further, a multi-electron beam detection system (100) for detecting a sample according to the above method is described.
描述了一种用于使用多电子束检测系统(100)检测样品的方法。该方法包含：将样品放置于在X-Y平面延伸的可移动平台(110)上；产生向样品传播的多个电子束(105)；在二维阵列中的多个探测位置(106)处将电子束聚焦在该样品上；通过以预定扫描模式移动该可移动平台来扫描样品表面，同时保持多个电子束静止；以及检测在该可移动平台的移动期间从该样品发射的信号电子，以用于检测该样品。进一步地，描述了用于根据以上方法检测样品的多电子束检测系统(100)。</abstract><oa>free_for_read</oa></addata></record> |
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| title | Method for detecting sample and multi-electron beam detection system |
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