COMPOSITION AND METHOD FOR WASHING ADHESIVE POLYMER
Provided is a composition in which a decrease in etching rate over time is suppressed. A composition comprising: at least one of a fluorinated alkyl quaternary ammonium and a hydrate of a fluorinated alkyl quaternary ammonium; (A) an N-substituted amide compound having no active hydrogen on the nitr...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Provided is a composition in which a decrease in etching rate over time is suppressed. A composition comprising: at least one of a fluorinated alkyl quaternary ammonium and a hydrate of a fluorinated alkyl quaternary ammonium; (A) an N-substituted amide compound having no active hydrogen on the nitrogen atom and (B) dipropylene glycol dimethyl ether as aprotic solvents; and an antioxidant.
提供抑制了经时的蚀刻速度的降低的组合物。一种组合物,其包含:氟化烷基季铵和氟化烷基季铵的水合物中的至少1种;作为非质子性溶剂的(A)在氮原子上不具有活性氢的N-取代酰胺化合物、和(B)双丙甘醇二甲基醚;以及抗氧化剂。 |
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