COMPOSITION AND METHOD FOR WASHING ADHESIVE POLYMER

Provided is a composition in which a decrease in etching rate over time is suppressed. A composition comprising: at least one of a fluorinated alkyl quaternary ammonium and a hydrate of a fluorinated alkyl quaternary ammonium; (A) an N-substituted amide compound having no active hydrogen on the nitr...

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Bibliographische Detailangaben
Hauptverfasser: NAKAZAKI SUSUMU, HAYASHI KOUTAROU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Provided is a composition in which a decrease in etching rate over time is suppressed. A composition comprising: at least one of a fluorinated alkyl quaternary ammonium and a hydrate of a fluorinated alkyl quaternary ammonium; (A) an N-substituted amide compound having no active hydrogen on the nitrogen atom and (B) dipropylene glycol dimethyl ether as aprotic solvents; and an antioxidant. 提供抑制了经时的蚀刻速度的降低的组合物。一种组合物,其包含:氟化烷基季铵和氟化烷基季铵的水合物中的至少1种;作为非质子性溶剂的(A)在氮原子上不具有活性氢的N-取代酰胺化合物、和(B)双丙甘醇二甲基醚;以及抗氧化剂。