SMIF box loading equipment

The invention discloses SMIF box loading equipment, and belongs to the technical field of semiconductors. In order to solve the problem of poor transfer stability, the SMIF box loading equipment comprises an equipment frame, an opening and closing device is arranged in front of the equipment frame and used for bearing, opening and closing an SMIF box, a robot arm is arranged in the equipment frame, an end effector is arranged at the tail end of the robot arm, and the SMIF box is arranged in the equipment frame. And the robot arm is used for driving the end effector to move vertically and horizontally so as to enter and exit the SMIF box and pick and place the wafer basket. According to the invention, SMIF box loading is realized, and multi-layer wafer basket taking and placing can be realized in a limited space. 本发明公开了一种SMIF盒装载设备，属于半导体技术领域。针对转移稳定性较差的问题，本发明提供SMIF盒装载设备，包括设备框架，所述设备框架的前方设置有开合装置，所述开合装置用于承载以及开闭SMIF盒，所述设备框架的内部设置有机器人手臂，所述机器人手臂的末端设置有末端执行器，所述机器人手臂用于带动所述末端执行器垂直以及水平移动，以进出所述SMIF盒以及取放晶圆花篮。本发明实现SMIF盒装载，且在有限