Adjusting and fixing device of temperature measuring device and semiconductor equipment

The invention provides an adjusting and fixing device of a temperature measuring device and semiconductor equipment, the temperature measuring device comprises a horizontal section and a vertical section connected with the horizontal section, the horizontal section penetrates through a semiconductor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	YANG HUIPING, YANG SHUAI, HUANG RONGBIAO, GUAN XIAOCHEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING FURNACES FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL HEATING KILNS LIGHTING MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE MECHANICAL ENGINEERING OPEN SINTERING OR LIKE APPARATUS OVENS PHYSICS RETORTS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR WEAPONS
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