Adjusting and fixing device of temperature measuring device and semiconductor equipment

The invention provides an adjusting and fixing device of a temperature measuring device and semiconductor equipment, the temperature measuring device comprises a horizontal section and a vertical section connected with the horizontal section, the horizontal section penetrates through a semiconductor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	YANG HUIPING, YANG SHUAI, HUANG RONGBIAO, GUAN XIAOCHEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING FURNACES FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL HEATING KILNS LIGHTING MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE MECHANICAL ENGINEERING OPEN SINTERING OR LIKE APPARATUS OVENS PHYSICS RETORTS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR WEAPONS
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Beschreibung
Zusammenfassung:	The invention provides an adjusting and fixing device of a temperature measuring device and semiconductor equipment, the temperature measuring device comprises a horizontal section and a vertical section connected with the horizontal section, the horizontal section penetrates through a semiconductor reaction chamber and extends into the semiconductor reaction chamber from the outside, the vertical section is located in the semiconductor reaction chamber, and the vertical section is connected with the horizontal section. The adjusting and fixing device extends from the bottom to the top of the semiconductor reaction chamber and comprises a fixing and supporting assembly and a first adjusting assembly, the fixing and supporting assembly is arranged in the semiconductor reaction chamber, and the first adjusting assembly is arranged on the fixing and supporting assembly and matched with the part, located in the semiconductor reaction chamber, of the horizontal section; and the verticality of the vertical section