Integrated circuit, metalized structure of integrated circuit and manufacturing method of metalized structure

A metallization structure of an integrated circuit (IC) includes: an inter-metal dielectric (IMD) layer; a patterned metal layer embedded in the IMD layer; a patterned top metal layer disposed on the IMD layer; an electrical via including a via material passing through the IMD layer and connecting t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CHEN GUANYU, WEI SHIZHAN, YANG QIHAN, CHEN LONGHUI
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A metallization structure of an integrated circuit (IC) includes: an inter-metal dielectric (IMD) layer; a patterned metal layer embedded in the IMD layer; a patterned top metal layer disposed on the IMD layer; an electrical via including a via material passing through the IMD layer and connecting the patterned top metal layer and the patterned metal layer embedded in the IMD layer; and a metal-insulator-metal (MIM) capacitor. The MIM capacitor includes: a first capacitor metal layer including a via material contacting an MIM capacitor landing region of a patterned metal layer embedded in an IMD layer; a second capacitor metal layer including a via material contacting the first MIM capacitor terminal region of the patterned top metal layer; and an insulator layer disposed between the first capacitor metal layer and the second capacitor metal layer. 一种集成电路(IC)的金属化结构包含:金属间介电(IMD)层;图案化金属层,嵌入在IMD层中;图案化顶部金属层,配置在IMD层上;电通孔,包括穿过IMD层的通孔材料且连接图案化顶部金属层和嵌入在IMD层中的图案化金属层;以及金属-绝缘体-金属(MIM)电容器。MIM电容器包含:第一电容器金属层,包括接触嵌入在IMD层中的图案