Material defect detection method and device, electronic equipment and computer storage medium

The invention relates to the technical field of semiconductors, and provides a material defect detection method and device, electronic equipment and a computer storage medium. Comprising the following steps: transmitting a pulse laser beam based on a detection request, and adjusting the pulse laser beam into a collimated beam; focusing the collimated light beam, and radiating a laser spot formed by focusing to the semiconductor material to be detected; receiving a mechanical wave generated by the semiconductor material to be detected under the excitation of the laser spot, and performing defect detection based on the mechanical wave to obtain a defect detection result of the semiconductor material to be detected. As the pulse laser beam does not damage the to-be-detected semiconductor material, nondestructive defect detection of the to-be-detected semiconductor material can be realized; meanwhile, the defect detection of the to-be-detected semiconductor material is carried out based on the mechanical wave, an