Thin pellicle material for protection of solid state electron detectors

The invention provides an electron beam system and method. The system includes a detector having a detector face configured to detect backscattered electrons reflected off the sample. The system further includes an annular cover disposed on the detector face and a protective film disposed on the ann...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SCHULTZ WILLIAM G
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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