Thin pellicle material for protection of solid state electron detectors

The invention provides an electron beam system and method. The system includes a detector having a detector face configured to detect backscattered electrons reflected off the sample. The system further includes an annular cover disposed on the detector face and a protective film disposed on the annular cover to cover the detector face. The protective film is transparent to backscattered electrons and provides a physical barrier for particles directed toward the detector face. 本发明提供一种电子束系统及方法。所述系统包含具有经配置以检测被反射离开样本的背散射电子的检测器面的检测器。所述系统进一步包含安置于所述检测器面上的环形盖及安置于所述环形盖上以覆盖所述检测器面的保护膜。所述保护膜对于背散射电子透明且对于指向所述检测器面的粒子提供物理势垒。