Variable column type anode shell type cathode square three-dimensional detector and preparation method thereof

The invention discloses a variable column type anode shell type cathode square three-dimensional detector and a preparation method thereof.The detector is formed by splicing semiconductor substrate unit arrays, each semiconductor substrate unit is in the shape of a quadrangular prism, and each semic...

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Bibliographische Detailangaben
Hauptverfasser:	ZHAO ZHENYANG, LU SHUNMAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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