Variable column type anode shell type cathode square three-dimensional detector and preparation method thereof

The invention discloses a variable column type anode shell type cathode square three-dimensional detector and a preparation method thereof.The detector is formed by splicing semiconductor substrate unit arrays, each semiconductor substrate unit is in the shape of a quadrangular prism, and each semiconductor substrate unit comprises a semiconductor detector unit substrate; the side face and the bottom of the semiconductor detector unit base body are filled with shell type cathode electrodes, second aluminum electrode contact layers are attached to the tops of the shell type cathode electrodes, a center variable column type anode electrode is embedded into the top of the semiconductor detector unit base body, and a first aluminum electrode contact layer is arranged on the center variable column type anode electrode. And a silicon dioxide insulating layer is filled between the first aluminum electrode contact layer and the second aluminum electrode contact layer. The preparation method of the detector comprises